JPH0180755U - - Google Patents
Info
- Publication number
- JPH0180755U JPH0180755U JP1987152539U JP15253987U JPH0180755U JP H0180755 U JPH0180755 U JP H0180755U JP 1987152539 U JP1987152539 U JP 1987152539U JP 15253987 U JP15253987 U JP 15253987U JP H0180755 U JPH0180755 U JP H0180755U
- Authority
- JP
- Japan
- Prior art keywords
- micro
- piezoelectric element
- positioning mechanism
- element body
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 238000005452 bending Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000000241 respiratory effect Effects 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152539U JPH088405Y2 (ja) | 1987-10-05 | 1987-10-05 | 圧電素子微小位置決め機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152539U JPH088405Y2 (ja) | 1987-10-05 | 1987-10-05 | 圧電素子微小位置決め機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180755U true JPH0180755U (en]) | 1989-05-30 |
| JPH088405Y2 JPH088405Y2 (ja) | 1996-03-06 |
Family
ID=31427559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987152539U Expired - Lifetime JPH088405Y2 (ja) | 1987-10-05 | 1987-10-05 | 圧電素子微小位置決め機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH088405Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01287606A (ja) * | 1988-05-16 | 1989-11-20 | Mitsubishi Electric Corp | 走査型トンネル顕微鏡の微動機構 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117379A (ja) * | 1985-11-16 | 1987-05-28 | Tohoku Metal Ind Ltd | 円筒型圧電アクチユエ−タ及びその製造方法 |
-
1987
- 1987-10-05 JP JP1987152539U patent/JPH088405Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117379A (ja) * | 1985-11-16 | 1987-05-28 | Tohoku Metal Ind Ltd | 円筒型圧電アクチユエ−タ及びその製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01287606A (ja) * | 1988-05-16 | 1989-11-20 | Mitsubishi Electric Corp | 走査型トンネル顕微鏡の微動機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH088405Y2 (ja) | 1996-03-06 |